| Characteristics It can achieve continuous and uninterrupted safe supply of electronic-grade specialty gases at high flow rates and is mainly controlled by PLC. Operator is able to control the system via the touch screen HMI (Human machine interface). Main Features It features automatic purging, auto switch over, and safety cut-off in emergencies.
Application Mainly applicable to the centralized gas supply needs of specialty gases in IC, TFT, Solar, LED factories, etc. Gas Source Supply Method Cylinder. |
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Characteristics It can facilitate the multi-point distribution of gas flow from the supply source to the point of use.
Main Features It features purging, exhaust, expansion ports, and an automatic safety cut-off mechanism for emergencies.
Application Mainly applicable to the centralized gas supply needs of specialty gases in IC, TFT, Solar, LED factories, etc. |
Characteristics It can achieve continuous and uninterrupted safe supply of electronic-grade specialty gases at high flow rates and is mainly controlled by PLC. Operator is able to control the system via the touch screen HMI(Human machine interface).
Main Features It features automatic purging, auto switch over, and safety cut-off in emergencies.
Application Mainly applicable to the centralized gas supply needs of specialty gases in IC, TFT, Solar, LED factories, etc. Applicable Gases Flammable/combustible, corrosive, toxic gases, such as SiH4, NF3, NH3, N2O, HCI, etc.
Gas Source Supply Method ISO Tube Trailer, ISO Tank, Y-cylinder, T-cylinder, etc. |
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Characteristics It can detect on-line mixing and delivery specifications for two different gases when based on preset ratio. This enable real time monitor of the specifications of the mixing gases.
Main Features The system enables the high-precision online gas mixing and real-time monitoring of the quality of the mixed gas.
Application Mainly applicable to the gas mixing needs of IC, TFT factories, etc. Applicable Gases B2H6/H2, Cl2/N2, H2/N2, H2/He, H2/Ar, etc
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Characteristics It can achieve safe supply of electronic-grade specialty gases.
Main Features Customized to meet different needs and specific process requirements of different customers.
Application Mainly applicable to the gas supply needs for university laboratories and research institutions. Applicable Gases Flammable/combustible, corrosive, toxic gases such as CH4, BCI3, H2S, etc. |
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UHP Filling
Characteristics Our system is capable of filling and applying high-purity electronic gases, standard gases, and multi-component mixed gases.
Main Features It features the automatic purging, automatic switching, and automatic safety cut-off in emergencies.
Application Mainly applicable to the electronic gas filling, standard gas filling, and electronic gas mixing.
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High Flow Pressure Relief System
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