| Characteristics It can achieve continuous and uninterrupted safe supply of electronic-grade specialty gases at high flow rates and is mainly controlled by PLC. The touch screen is the human-machine interface. Main Features It features the automatic purging, automatic switching, and automatic safety cut-off in emergencies.
Application Mainly applicable to the centralized gas supply needs of specialty gases in IC, TFT, Solar, LED factories, etc. Gas Source Supply Method Cylinder. |
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Characteristics It can facilitate the multi-point distribution of raw materials from the supply source to the point of use.
Main Features It features purging, exhaust, expansion ports, and an automatic safety cut-off mechanism for emergencies.
Application Mainly applicable to the centralized gas supply needs of specialty gases in IC, TFT, Solar, LED factories, etc. |
Characteristics It can achieve continuous and uninterrupted safe supply of electronic-grade specialty gases at high flow rates and is mainly controlled by PLC. The touch screen is the human-machine interface.
Main Features It features the automatic purging, automatic switching, and automatic safety cut-off in emergencies.
Application Mainly applicable to the centralized gas supply needs of specialty gases in IC, TFT, Solar, LED factories, etc. Applicable Gases Inflammable/combustible, corrosive, toxic gases, such as SiH4, NF3, NH3, N2O, HCI, etc.
Gas Source Supply Method ISO Tube Trailer, ISO Tank, Y-cylinder, T-cylinder, etc. |
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Characteristics It can realize the online mixing and delivery of two different gases in a predetermined ratio, and enable the real-time monitoring of the quality of the mixed gas.
Main Features The system enables the high-precision online gas mixing and real-time monitoring of the quality of the mixed gas.
Application Mainly applicable to the gas mixing needs of IC, TFT factories, etc. Applicable Gases B2H6/H2, Cl2/N2, H2/N2, H2/He, H2/Ar, etc
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Characteristics It can achieve safe supply of electronic-grade specialty gases.
Main Features It may meet the specific process requirements of our customers.
Application Mainly applicable to the gas supply needs in special occasions such as university laboratories and research institutions. Applicable Gases Inflammable/combustible, corrosive, toxicgases, such as CH4, BCI3, H2S, etc. |
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UHP Filling
Characteristics Our system is capable of filling and applying high-purity electronic gases, standard gases, and multi-component mixed gases.
Main Features It features the automatic purging, automatic switching, and automatic safety cut-off in emergencies.
Application Mainly applicable to the electronic gas filling, standard gas filling, and electronic gas mixing.
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High Flow Pressure Relief System
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